Scanning Electron Microscopes / FIB

FEI Quanta 600i Environmental SEM

FEI Quanta 600i

The Quanta SEM has operating vacuum modes to deal with different types of samples. High Vacuum (HiVac) is the conventional operating mode associated with all scanning electron microscopes. The two other application modes are Low Vacuum (LowVac) and ESEM. In these modes the specimen chamber is at a pressure range of 0.1 to 30 Torr (15 to 4000 Pa). Either mode can use water vapor from a built-in water reservoir, or auxiliary gas supplied by the user.  Observation of outgassing or highly charging materials can be made using one of these modes without the need to metal coat the sample.

  • Tungsten Cathode
  • Secondary (SEI) and Backscatter (BEI) Imaging
  • Three modes of operation:
    1. High Vacuum (10-6 torr)
    2. Low vacuum (0.1 – 1.0 torr)
    3. ESEM (1.0 – 10 torr)
  • EDAX “Element” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
  • Large Sample Chamber
  • Hot Stages (rated to 1500°C)
  • Peltier Cold Stage
JEOL JSM-7000F Field Emission SEM

JEOL JSM 7000F in use

JEOL JSM 7000FThe JSM-7000F is a field-emission scanning electron microscope with a Schottky type field-emission gun for the electron source and state-of-the-art computer technology for the image-display system. The instrument is equipped for EDS and EBSD analysis.

  • Schottky Field Emission Cathode
  • High Resolution (1.2nm @30kV)
  • Secondary (SEI) and Backscatter (BEI-TOPO/COMPO) Imaging
  • EDAX “Octane Pro” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
  • EDAX “Hikari Pro” 600pps Electron Backscatter Diffraction (EBSD) detector
  • Electron Lithography
FEI Helios Nanolab 600i FIB

FEI Helios Nanolab 600i in use

The Helios NanoLab 600i is a SEM/FIB DualBeam workstation with a Ga ion column for imaging and sample milling and Pt deposition (GIS) capability. Nanoscale chemical analysis may be performed with an EDAX energy dispersive X-ray spectroscopy (EDS) system. The instrument is also outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3-D reconstructions of the material composition and crystallography. In-situ manipulation for TEM foil extraction is performed using an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution.

  • Schottky Field Emission Cathode
  • Resolution: 0.9 nm at 15 kV (at eucentric WD)
                       1.4 nm at 1 kV (at optimum WD)
  • Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV
  • Platinum Deposition (GIS) System
  • Secondary (SEI) and Backscatter (BEI) Imaging
    • In-lens SE detector (TLD-SE)
    • In-lens BSE detector (TLD-BSE)
    • Everhardt-Thornley SE
    • Solid-state BF and DF STEM detector
  • AutoFIB, AutoTEM, Slice and View, and EBS3 Software
  • EDAX “Octane Super” SDD Energy Dispersive Spectroscopy of X-rays (EDS)
  • EDAX “Hikari Super” 1400pps Electron Backscatter Diffraction (EBSD) detector
  • EDAX TEAM software
  • Omniprobe Autoprobe™ 200 Nano-manipulator
Tescan S8252G Raman-SEM/FIB

The TESCAN S8000G is an Ultra-High Resolution Variable Pressure Schottky field emission scanning electron microscope/Ga+ focused ion beam instrument for imaging and sample milling and W, Fe, and Co deposition (GIS) capabilities. It is equipped with WITec in-situ confocal Raman imaging at 532 nm and 785 nm excitation wavelengths using a 100x objective, NA = 0.75.  The SEM/FIB has an Everhart-Thornley detector, two retractable backscatter detectors (one water-cooled), an in-beam multi-detector, in-beam axial detector, and secondary ion detector.  The instrument is also capable of 3-D imaging using any of the detectors.

Nanoscale compositional analysis may be performed with an EDAX Octane Elect Plus (30mm2) energy dispersive X-ray spectroscopy (EDS) system with APEX software.

In-situ manipulation for TEM foil extraction is performed using a SmarAct nano-manipulator, with 1 nm positioning resolution and an electron flood gun for charge neutralization during ion beam milling

The Gatan Murano heating stage allows for in-situ analysis from room temperature to 950 C.

  • SEM Resolution: 0.9 nm at 15 kV (at 1 mm WD)
  • Ga Source Focused Ion Beam (FIB) – 0.5 kV to 30 kV, up to 100nA
  • Optical resolution: diffraction limited lateral typ. 430 nm @ 532 nm excitation wavelength
  • 532 nm, 75mW diode-pumped solid state laser
  • 785 nm, 125 mW diode laser
  • Fully motorized, heavy-duty compucentric 5-axis cradle stage (X=256mm, Y=152mm, Z=52mm, Rotation=360º, Bidirectional tilt = -3º to +70º, 8kg weight capacity

This instrument was acquired through the support of the National Science Foundation (DMR-1828454)

Transmission Electron Microscopes

FEI Tecnai T12

Tecnai™ G2 Spirit TWIN (T12)

• Accelerating Voltage:  20-120KV
• Gun Type:  W Filament/LaB6
• Line resolution (nm):  0.2
• Cs objective (mm):  2.2
• Cc objective (mm):  2.2
• Focal length (mm):  2.8
• Minimum focus step (nm):  3.0
• Maximum eucentric tilt:  ± 70°
• Magnification:  18 – 650 000
• Specimen Exchange Time:  < 30 seconds
• High tension switching Time:  < 1 minute
• X, Y movement:  2 mm
• Elemental Analysis:  EDAX Element EDS System
• Image Capture:  CD Camera and Film
• Specimen Holders:  Single and Double Tilt



FEI Talos F200X in use

FEI Talos F200XThe FEI Co. Talos F200X 200keV field emission scanning / transmission electron microscope is located in the CoorsTek Building (Room 001P).  The FEI X-FEG high brightness electron source delivers high total current — up to five times the beam current of a standard Schottky FEG — while the integrated EDS system with four silicon drift detectors (SDDs) offers mapping capabilities of up to 105 spectra/sec. It has a TEM information limit better than 0.12nm. The STEM probe allows for an imaging resolution of 0.16 nm. STEM images can be viewed in bright field or with multiple dark field detectors, including a high-angle annular dark field detector (HAADF) allowing for Z-contrast imaging.

  • Schottky Field Emission Gun
  • 200kV Accelerating Voltage
  • Conventional and Scanning Modes (CTEM/STEM)
  • High Resolution (HREM): 0.12nm Information Limit
  • Super-X EDS for Spectral Imaging
  • High Angle Annular (HAADF) and Centered (CDF) Dark Field Modes

Other Instruments

PANalytical PW3040 X-ray Diffractometer

PANalytical PW3040 X-ray Diffractometer in use

This PANalytical (nee Philips) instrument is equipped with a versatile computer-controlled diffractometer and is ideal for routine XRD analysis of powder/polycrystalline specimens. Collection and search software includes the current ICDD database.

  • Routine powder/polycrystalline diffraction
  • Computer Controlled Stage with X’pert Pro MPD
    • Data Collector and DataView Software
    • HighScore Search Software
    • Current ICDD Database
  • Cu and Cr Tubes Available
WiTec Laser Confocal / Raman

WiTec Laser Confocal / Raman This instrument is a WiTec Alpha300 laser confocal microscope equipped with a Raman spectrometer.

Specimen Preparation


  • Slow Speed Diamond Saws
  • Grinding Wheels
  • EVACTRON CombiClean Decontaminator


  • Vibromet Polisher
  • JEOL IB-0910CP Cross-Section Polisher
  • Hummer IV Sputtering System (Au/C Coater)


  • Gatan Grinding Fixture
  • 3mm Foil Punch
  • South Bay Model 350 3mm TEM Disk Cutter
  • Gatan Dimpler
  • Gatan Model 600 Dual Mill
  • Fischione Electropolishing System

For a complete list of characterization equipment at Colorado School of Mines: